English
scatterometry
From scatter + -o- + -metry.
Today it means
noun The design and use of scatterometers
Sources
Sources: Wiktionary, “scatterometry”. By Wiktionary contributors, CC BY-SA 4.0, via kaikki.org (dump of Oct 3 2026); text adapted and restructured. Language periods are conventional ranges, not dates for this word. License.
Etymograph / scatterometry